Data Profile for This Category
Semiconductor wafer fabrication process and exception data primarily originates from MES systems, equipment FDC monitoring modules, defect detection and metrology devices, wafer map files, process recipe libraries, and experimental data. Daily generated documents include process flow cards, batch operation records, equipment recipes, SPC control charts, exception handling sheets, defect atlases, yield reports, and more. Fields include wafer batch numbers, process parameters (temperature, pressure, etc., with units of degrees Celsius, pascals), defect coordinates, yield values, and additional relevant metrics. Data update frequencies fall into three categories: per wafer batch, real-time, and daily. This covers the full workflow from process execution to batch completion.
Constraints for Tool Calling and Plugins Workflow
Wafer fabrication data sources are scattered and have inconsistent formats. Tool calling plugins must support associated data pulling and format conversion across multiple sources. Data update cycles range from real-time to batch-level. Tool triggering timing must align with each data type’s update cycle to avoid delayed or redundant pulls. The process chain is lengthy, with highly coupled parameters. Tool calling must cover parameter organization and cross-module attribution for hundreds of process steps. Call duration must be controlled to fit limited rework windows. Process reports are intended for frontline manufacturing staff. Tool outputs must simplify technical details and only retain core conclusions.
Configuration Settings
This configuration is based on FastGPT v4.17.0.
| Configuration Item | Recommended Setting | Rationale |
|---|---|---|
| Workflow/API tool selection | Force call specified tool set | Adapt to process document generation linked to multiple fabrication process steps, prevent the model from missing critical steps when selecting tools independently |
| Workflow/API function-call configuration | Enable structured function calling | Support structured process parameter extraction and exception attribution, ensure output format complies with process report requirements |
| Maximum tool call count | 8–12 times | Cover parameter organization and exception attribution for hundreds of process steps, avoid insufficient calls that prevent completion of full-process reports |
| Timeout threshold | 600–900 seconds | Match the time required for real-time equipment data pulling and SPC chart analysis, align with the processing rhythm of each wafer batch |
| Context window size | 8000–12000 token | Support integration of multiple process documents and exception data, prevent context overflow |
| Tool output display | Hide tool input and response content | Improve readability of final reports, match the reading habits of manufacturing personnel |
| Data source binding rule | Bind MES and equipment data for the current wafer batch | Ensure process documents and exception reports use data sources matching the current batch, avoid cross-batch data mix-ups |
Three Common Configuration Errors
- Tool call timeout, where elapsed time exceeds 600 seconds but only partial exception data is returned. This occurs when data source scope is not limited, pulling full historical wafer batch process data which exceeds platform processing limits.
- Triggered error after configuring database connection plugins. This happens when dedicated wafer fabrication MES or equipment data source tables are not bound, with field matching not meeting process parameter format requirements.
- Tool call output displays full tool input and response content. This is caused by not enabling output filtering configuration, resulting in excessive technical details being included in reports that do not fit manufacturing staff’s reading habits.
How to Verify Correct Configuration
- Trigger a single wafer batch process document generation task. Check that tool call logs only associate data sources for the current batch.
- Run an exception report drafting task. Confirm that tool call duration falls within the preset 600–900 second range.
- Review the final generated report. Confirm that tool call input and response content are not displayed.
- Test a multi-step linked exception attribution task. Check that tool call count stays within the preset 8–12 times range.
The values provided are common starting points and should be measured against the reader's own samples.